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Communication Dans Un Congrès Année : 2017

Non-Linear Vibration Electret-Harvester with Optimized Curved Beam for Low-Frequency Operation

Résumé

In this study, we report the design and fabrication results of an optimized curved beam structure for low frequency, under one-hundred Hz, and non-linear operation of MEMS (Micro- Electromechanical Systems) vibration energy harvester. The optimization procedure for shape and dimension of the curved beam were established combining a FEM and a numerical analysis. Simulated curved beam with bi-stable motion was evaluated for wide bandwidth operation of a vibration energy harvester and preliminary fabrication process was confirmed.
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Dates et versions

hal-02095921 , version 1 (10-04-2019)

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Koki Yamamoto, Adrien Badel, Fabien Formosa, Ludovic Charleux, Takayuki Fujita, et al.. Non-Linear Vibration Electret-Harvester with Optimized Curved Beam for Low-Frequency Operation. PowerMEMS 2017, Dec 2017, Kanazawa, Japan. pp.012122, ⟨10.1088/1742-6596/1052/1/012122⟩. ⟨hal-02095921⟩
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