Non-Linear Vibration Electret-Harvester with Optimized Curved Beam for Low-Frequency Operation
Résumé
In this study, we report the design and fabrication results of an optimized curved beam structure for low frequency, under one-hundred Hz, and non-linear operation of MEMS (Micro- Electromechanical Systems) vibration energy harvester. The optimization procedure for shape and dimension of the curved beam were established combining a FEM and a numerical analysis. Simulated curved beam with bi-stable motion was evaluated for wide bandwidth operation of a vibration energy harvester and preliminary fabrication process was confirmed.
Domaines
Sciences de l'ingénieur [physics]
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Yamamoto_2018_J._Phys.%3A_Conf._Ser._1052_012122.pdf (993.68 Ko)
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